Director of Taiwan High-Tech Facility Research Center Elevated to Fellow Status

January 5, 2018


Luh-Maan Chang, Ph.D., F.ASCE, a professor emeritus of Purdue University and National Taiwan University, has been named a Fellow by the ASCE Board of Direction.

Chang is the director of the High-Tech Facility Research Center, as well as an adjunct professor, at the NTU Civil Engineering Department, and a researcher at the NTU Climate Change and Sustainability Research Center. His current research interests are contamination control for below-10nm semiconductor manufacturing, vibration prevention and mitigation for a high-tech fab, and applying 3D modeling for 4D scheduling and project management.

He has been an ASCE member since 1983. He actively participated in the ASCE International Activities Committee and is now heavily involved with the Asian Civil Engineering Coordination Council, of which ASCE is a member.

Chang FR SidebarEarly in his academic career, Chang focused on construction productivity improvement within the civil engineering discipline. He has since continued to search for new theories and advanced technologies that can be applied in the improvement of construction productivity. Major areas include artificial intelligence, image processing and pattern recognition, nondestructive in-place testing, precast prestressed concrete pavement, and build-operate-transfer methods.

Since the early 2000s, when semiconductor-related manufacturing was scaled down to below 100-nanometer level, Chang has been trying to bridge civil engineering with the design and construction management of semiconductor fabrication plants (fab), since a fab is an indispensable part of and prerequisite to manufacturing.

To achieve high-yield and massive volume of production, thousands of high-performance tools, extremely precise instruments, and ultrapure utilities are used in a high-tech fab. Moreover, these tools/instruments/utilities must be housed in stringently controlled cleanrooms, operated on stable platforms, and/or performed within an allowable electromagnetic interference. Chang has devoted recent efforts to exploring sustainable interdisciplinary methods in controlling contamination, and mitigating vibration and EMI.

He received a B.S. degree from National Cheng-Kung University, Taiwan. From 1974 to 1977, he worked as a project engineer for Industry Technology Research Institute, where he helped design/build the first Integrated Circuit Demonstration Plant of Taiwan.

After earning his M.S. and Ph.D. from the University of Texas at Austin, Chang taught at the School of Building Construction, University of Florida–Gainesville. From 1986 to 2009, he taught at the School of Civil Engineering at Purdue University–West Lafayette. He continued teaching in the NTU Civil Engineering Department until he retired in 2016.

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